JPH0479417U - - Google Patents
Info
- Publication number
- JPH0479417U JPH0479417U JP12131490U JP12131490U JPH0479417U JP H0479417 U JPH0479417 U JP H0479417U JP 12131490 U JP12131490 U JP 12131490U JP 12131490 U JP12131490 U JP 12131490U JP H0479417 U JPH0479417 U JP H0479417U
- Authority
- JP
- Japan
- Prior art keywords
- wafer stage
- wafer
- reduction lens
- foreign matter
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims description 5
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12131490U JPH0479417U (en]) | 1990-11-21 | 1990-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12131490U JPH0479417U (en]) | 1990-11-21 | 1990-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0479417U true JPH0479417U (en]) | 1992-07-10 |
Family
ID=31869174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12131490U Pending JPH0479417U (en]) | 1990-11-21 | 1990-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0479417U (en]) |
-
1990
- 1990-11-21 JP JP12131490U patent/JPH0479417U/ja active Pending
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